MEMS Thin Film Process Laboratory
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Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-sen University
No., 70 Lien-hai Rd., Kaohsiung, 804, Taiwan, R.O.C | Tel : 886-7-5252000 ext. 4201-4205
E-MAIL : mechaa@mail.nsysu.edu.tw